Customized factory automation system

Semiconductor manufacturing (Front end process) system
ECU inspection system

Semiconductor　manufacturing (Front end process) system

Automatic mask exposure system

SPECIFICATION
Exposure	1:1(actual size),Contct exposure
Contact method	Hard,Soft,Gap
Adaptable work	4inch(3inch~8inch possible)
Adaptable mask	5inch
Exposure source of light	Primal wavelength 365/405/436nm
Alignment precision	±1.0μｍ(2million pixels/CCD/microscope of 4times magnifications)
Control	automatic exposure system/2magazines available

Minimal mask aligner

We manufacture mask aligners as a member of “minimal fab technology research association of National Institute of Advanced Industrial Science and Technology”

Outline specifications
Optical system for mark	2million pixels camera(4times magnifications of objective lens)
Optical systemfor orientation flat	2million pixels camera(4times magnifications of objective lens)
XYZ alignment axis	resolution 0.1μｍ
θaxis	resolution 8sec(0.00225°)
Exposure light source (LED)	wavelength=365±5nｍ irradiation intensity=45mw/cm2
Adaptive	φ0.5inchｔ=0.8mm
Adaptive mask	φ0.5inch
Exposure method	Possible to set with 0.1μｍ resolution optionally Soft contact (load cell pressure detection) hard contact (flowing up by the air)

Minimalfab Website
http://www.minimalfab.com/

Roll pressurization type imprint system

Outline

This system is for UV imprinting from large size mold to film substrate. This system coats UV cured resin on the mold, and put film base material on the top, and applies pressure by a roller which is pressurized and speed controlled with high accuracy, then is cured and patterned by UV irradiation. Coat UV resin: Manual (option: coat automatically by dispenser)

Bar coater	Spread UV resin equally by the bar coater
Transcription method	Roller pressure method by the Transcription roller (Transcription speed 0.1mm/sec-50.0mm/sec)
Flatness accuracy	Stone plate 00 level (flatness accuracy=2μｍ)
Adaptive method	1200ｍｍ x 750ｍｍ thickness 30ｍｍ
Exposure ligth source of UV (LED)	wavelength=375nm effective length=800ｍｍ (manufactured by RiseOne)
Others	Install film cleaner and discharging bar